Author Topic: EEVblog #992 - Olympus BHM Wafer Inspection Microscope  (Read 19433 times)

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Offline EEVblogTopic starter

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EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« on: May 08, 2017, 09:34:43 pm »
Unboxing an ebay Olympus BHM wafer inspection metallurgical microscope and getting it working after a custom Cree LED light replacement.

 

Offline Dave3

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #1 on: May 08, 2017, 10:49:31 pm »
Neat toy.

I would make an eBay claim. Broken light and related components. And given poor state of box, you should claim that the delicate optics need to be recalibrated.

Absolutely unacceptable packaging. At an absolute min, all electronics and equipment must be double boxed and way overfilled with foam.

I wonder if the original bulb provides significantly better performance than an optimized LED contraption would.
 

Offline amspire

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #2 on: May 08, 2017, 11:28:04 pm »
I don't know how precisely Olympus make the objective lenses for focus, but to keep focus when you change the lenses, have you tried adjusting for focus with the x40 lens by moving the table, and then adjust for best focus for the the x10 (or lower) by using the dioptre adjustments on the eyepieces and the camera positions? Go back and forward a few times.

Sometimes Olympus microscopes work the other way, so you could try the objective distance at x10 and the dioptre at x40. Probably can end up with at least two objectives in focus this way.

Richard
« Last Edit: May 08, 2017, 11:36:06 pm by amspire »
 

Offline Grapsus

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #3 on: May 09, 2017, 12:14:14 am »
Damn you eBay shipping program !!! Two years ago I won a Fluke 343A voltage reference. It was shipped from the UK to France. The bare device was inside a paper box just rambling around and banging against the ground whenever the box was moved. They have no respect for precision equipment.
 
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Offline Brumby

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #4 on: May 09, 2017, 12:59:30 am »
Such packaging for any heavy bit of gear is totally unacceptable - let alone for a microscope such as this!

I noticed impressions on the inside of the top of the box - from the eyepieces it seems.  SERIOUSLY?

I would definitely be making noise about such an abysmal and totally, completely and hopelessly inadequate effort.  I've sent large ceramics interstate without ever getting a chip and while I don't claim my packaging is "professional" it certainly pisses all over that effort - but, then, that wouldn't be difficult.

This deserves a big "NOT ... HAPPY ... JAN!" and I would not be pushing for a claim on the broken lamp housing.  The break does look fresh - and the inadequate packaging offers no defence to damage in transit.

(For those unfamiliar with the phrase: https://en.wikipedia.org/wiki/Not_happy,_Jan! )



Oh, nice microsope  :-+
« Last Edit: May 09, 2017, 01:03:26 am by Brumby »
 

Offline Brumby

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #5 on: May 09, 2017, 01:08:07 am »
While we're on the subject, one has to wonder what other damage may have occurred that Dave is yet to discover.

For example - is the roughness of the stage movement something that existed before shipping?
 

Offline rs20

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #6 on: May 09, 2017, 01:11:33 am »
Your description of what a Plan objective is subtly but importantly incorrect. A Plan objective has a good flatness of field, i.e., the "plane" of perfect focus is (close to) an actual plane. In simpler terms, when looking at a planar object (e.g. a silicon wafer), the periphery of a non-Plan objective would be out of focus, not just distorted. Or, if you adjusted the focus slightly, you could have the periphery in focus but the center would be out of focus. The defining characteristic of a Plan objective is that the entire view is in focus at the same time (again, only when looking at a flat object like a wafer).

An important distinction because a non-Plan objective's image cannot be corrected in post-production like a merely distorted image could be.

Source

Awesome video! Glad it worked so well!
 
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Offline mdszy

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #7 on: May 09, 2017, 01:44:55 am »
I can certainly see how he could make a claim for crap packaging... but would eBay/whoever require that it be returned? It seems like filing and claim and having to return it would be more trouble than its worth.

Very cool 3D printed LED mount, though!
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Offline free_electron

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #8 on: May 09, 2017, 02:14:42 am »
shove one of my wafers under it !  ( the tiny little loose preamps from the silicon fab episode. those are silicon germanium)
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Offline hayatepilot

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #9 on: May 09, 2017, 05:22:51 am »
That packaging was horrible! :--

They should have used something like this:

 

Offline rs20

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #10 on: May 09, 2017, 05:37:08 am »
That packaging was horrible! :--

They should have used something like this:

Very impressive; but the fact I've never encountered such packaging makes me think it's prohibitively expensive. Probably much more practical to just train these people to pack things properly.
 

Offline LazyJack

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #11 on: May 09, 2017, 06:10:19 am »
Dave, I'd hate to disappoint you, but this packaging is by the seller. Ebax global shipping generally do not repackage. They may open it for customs paperwork, but do not repackage. I have purchased several Texktronix CROs from the US, from professional used test equipment dealers and all came in rock solid packaging. In one case the box actually had the seller company's name on it, so it was definitely not repacked.
For these large items, the GSP has unbeatable price and it is fast.
For smaller items, not that cheap, but many times it is the only way to get something overseas.
And yes, i had cases, wheret the seller didn't care, and the stuff was just rattling around in the box.
You should have asked for a partial refund on the broken light.
Can the GSP impove? Yes. But it is unfair to blame lousy packaging by the seller on them.
 

Offline BU508A

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #12 on: May 09, 2017, 06:55:32 am »
This is looking very similiar to the one from Dave:

http://www.ebay.de/itm/332212014062
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Offline nctnico

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #13 on: May 09, 2017, 07:18:29 am »
Dave, I'd hate to disappoint you, but this packaging is by the seller. Ebax global shipping generally do not repackage. They may open it for customs paperwork, but do not repackage. I have purchased several Texktronix CROs from the US, from professional used test equipment dealers and all came in rock solid packaging. In one case the box actually had the seller company's name on it, so it was definitely not repacked.
Yes same here. Ebay GSP doesn't repack. That would be way too costly and time consuming anyway!
There are small lies, big lies and then there is what is on the screen of your oscilloscope.
 

Offline FloFo

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #14 on: May 09, 2017, 08:15:24 am »
A few comments from someone doing microscopy (but not waffers) for a living and build his own experimental microscopes in the lab:
1) In the beginning dave said it's an stereoscopic microscope, which is off course not true. The Mantis would be stereoscopic, e.g. having two slightly different angeled beam paths for both eyes to give 3D perception. This microscope however doesen't have that, both eyes see exactly under the same angle (and i guess dave nows this). I assume he meant that it has a binocular tubus (which is better than a monocular tubus, you have to close one eye all the time which can be tiring). Unfortunately a mistake often made.
2) The fact that your Objectives are not parfocal (you have to refocus after switching the lens) is caused by wrong adjustment of the camera distance and eyepice distance. You should follow the following procedure:
a) set the eyepices to the right distance for your eyes
b) read the eyepice distance (in mm) at the scale above the eyepieces. The barrels around the eyepices have the same scale, set it to exactly these values
c) change to the highest magnification, focus on your sample. If you need glasses, do this step with the glasses or cantacts.
d) check if switching the lenses still requires focus adjustment. If so, slightly adjust the barrels of the eyepices till you get rid of this effect
e) when this works, focus on sample with high magnification and adjust camera to be focussed.
This procedure is quite complicated with this type of binocular tube, other manufactureres and later olympus scopes had other constructions that adjust the length of the optical path automatically when you change the width of the eyepices.
3) as mentioned before, it seems the table is slightly tilted. This could have happend in transitt, but can be solved by a skilled repairman (by shimming the table or slightly losening screws holding the table mount to the z  machanism and tapping it back). But the effect seems to be very slightly, so i wouldn't attemp to correct this. Chances are you make it worse.
4) Adapting a LED is a good way to upgrade old lightning. There are a few important notes:
a) you don't need much power (as you experienced). 1W is more than enough for brightfield and polarisation microscopy if adapted correctly (see below). Darkfield might use a bit more power, but dave doesn't have any of the necessary components anyway.
b) You should use a LED with a single emitter, you want to have a homogeneous light source
c) the size of the emitter should be the same as the size of filament in the old bulb
d) the LED surface should be at same position the bulb filament was in (and don't remove any lenses from the lamp housing). Idealy you should have an image of your light source in the back focal plane of the lenses (which you can check with special tools if necessary).
5) The optical quality of the middle class microscopes from india/china is quite good nowadays and can compete with the entry/mid level lenses from the big four (Nikon, Olympus, Zeiss, Leitz/Leica). If you need special lenses, you will end up with the big four (ans paying a few thousand bucks for one lens). The main disadvantage of the cheaper microscopes (like AM Scope) is the not so good mechanics and aviablility of aditional parts. The Olympus scope dave gought can be modifies for transmitted light, can do polarisation with a rotary table, Differential interference contrast (DIC), Phase Contrast, Fluorescence, darkfield, .... These microscopes are like a lego set, you have one frame and can add lots of different parts to create basically every technique you like.
 
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Offline EEVblogTopic starter

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #15 on: May 09, 2017, 08:47:05 am »
Dave, I'd hate to disappoint you, but this packaging is by the seller.

No it wasn't, they had a shipping company pack it and send.
 

Offline EEVblogTopic starter

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #16 on: May 09, 2017, 08:50:30 am »
5) The optical quality of the middle class microscopes from india/china is quite good nowadays and can compete with the entry/mid level lenses from the big four (Nikon, Olympus, Zeiss, Leitz/Leica). If you need special lenses, you will end up with the big four (ans paying a few thousand bucks for one lens). The main disadvantage of the cheaper microscopes (like AM Scope) is the not so good mechanics and aviablility of aditional parts. The Olympus scope dave gought can be modifies for transmitted light, can do polarisation with a rotary table, Differential interference contrast (DIC), Phase Contrast, Fluorescence, darkfield, .... These microscopes are like a lego set, you have one frame and can add lots of different parts to create basically every technique you like.

I'd like to at least get a polarisation filter and some colour filters for it to see what they do.
Also, x60 and x80 lens might be useful to complete the set. x100 will likely need oil to work properly.
 

Offline FloFo

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #17 on: May 09, 2017, 09:57:47 am »
5) The optical quality of the middle class microscopes from india/china is quite good nowadays and can compete with the entry/mid level lenses from the big four (Nikon, Olympus, Zeiss, Leitz/Leica). If you need special lenses, you will end up with the big four (ans paying a few thousand bucks for one lens). The main disadvantage of the cheaper microscopes (like AM Scope) is the not so good mechanics and aviablility of aditional parts. The Olympus scope dave gought can be modifies for transmitted light, can do polarisation with a rotary table, Differential interference contrast (DIC), Phase Contrast, Fluorescence, darkfield, .... These microscopes are like a lego set, you have one frame and can add lots of different parts to create basically every technique you like.

I'd like to at least get a polarisation filter and some colour filters for it to see what they do.
Also, x60 and x80 lens might be useful to complete the set. x100 will likely need oil to work properly.

As i said i'm not an expert with semiconductor microscopy, but i assume the polarisation filter will be useless. For polarisation microscopy you would combine two (one in illumination, one oriented under 90° in detection) to visualize birefringence of samples. A technique often used for mineralogy, but i don't expect birefringece from semiconductors.  From Color filters i don't expect much improvement either, but feel free to experiment with both ;)

Regarding the lensen: Be aware to get the right ones. Most lenses for biology application are calculated for 0,17mm of glass between lens and specimen, and espacially with high magnifications (or more precisely high NA) your image gets bad if you don't have the right thickness of glass (which you normally don't have for semiconductors). So you want to use ones for metallurgical microscopes (cover glass = 0). Your existing ones are MPlans, with the M standing for Metallurgical. You can get metallurgical lenses with magnifications over 100 without oil immersion. I would recommend to stick with Olympus MPlan lenses, mixing lenses from different manufacturers (or same manufacturer and different eras) have some pitfalls, mainly switching for finite to infinite conjugates, mechanical tube length (finite) or focal width of tube length (infinite) and parfocal distances (distance from Lens Thread to sample, nowadays mainly 45mm, but older microscopes can have shorter ones). An overview on Olympus lenses of your microscopes era can be found in this document: http://www.science-info.net/docs/olympus/olympus-micro-optics.pdf
 

Offline LazyJack

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #18 on: May 09, 2017, 10:54:37 am »
How do you know that? GSP works in a way that the seller packs the stuff up and sends it to the GSP center in the US. From that they handle international shipping. This is a convenience to the US sellers that they don't have to deal with customs labelling etc. And a convenience to the interanational buyers, because they can get the stuff at all.
The seller doesn't even know that it is going to be shipped outside of the US. So that is entirely possible that the seller used some crap shipping company to ship the microscope to the GSP center, but it was not arranged by GSP (Pitney Bowes), so it is not fair to blame them. They may get a blame on not noticing the substandard packaging, but after all, it is the sellers responsibility, to package properly and you can very well go for a refund if something is broken.
 

Offline Brumby

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #19 on: May 09, 2017, 12:28:42 pm »
Dave - a question:  Where did you get the "Angry Nerds" T-shirt?

I've been instructed to acquire one for someone in the household.
 

Offline Towger

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #20 on: May 09, 2017, 01:03:31 pm »
eBay GSP...  It serves a purpose, but I would always try and avoid it.  I have used it twice, the first time it was just being introduced in the UK and the seller (unknown to me) decided to use it to ship a couple of HV 2W resisters from the UK to Ireland.  WTF... A standard envelope with a couple of resistors, they took weeks to arrive via Norway, from memory. :horse:

The second time was more recent and despite the high costs, it was cheaper then ordering the parts direct from the official US supplier.  Who despite having the parts cheaper than on eBay, were looking 5 times their cost for FedEx shipping.

In both cases they arrived in the original packaging, in fact I think from the USA the parcel was placed in an additional eBay/PB bag.  In the early days of GSP a YouTuber did rant about it and said they were repackaging items to save cost/bulk, so the stories may stem from there.

BTW: The 'Part 2 Cleaning', while referenced is not available yet.
 

Offline jadew

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #21 on: May 09, 2017, 01:27:39 pm »
Nice. Looking forward for the comparison between the cheap ones and this one.
 

Offline free_electron

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #22 on: May 09, 2017, 02:22:17 pm »
5) The optical quality of the middle class microscopes from india/china is quite good nowadays and can compete with the entry/mid level lenses from the big four (Nikon, Olympus, Zeiss, Leitz/Leica). If you need special lenses, you will end up with the big four (ans paying a few thousand bucks for one lens). The main disadvantage of the cheaper microscopes (like AM Scope) is the not so good mechanics and aviablility of aditional parts. The Olympus scope dave gought can be modifies for transmitted light, can do polarisation with a rotary table, Differential interference contrast (DIC), Phase Contrast, Fluorescence, darkfield, .... These microscopes are like a lego set, you have one frame and can add lots of different parts to create basically every technique you like.

I'd like to at least get a polarisation filter and some colour filters for it to see what they do.
Also, x60 and x80 lens might be useful to complete the set. x100 will likely need oil to work properly.
My probe station had a mitutoyo microscope with a x200 lens ... no oil. MPLAN lens.
for lasercutting a had a x100 uv lens

http://www.mitutoyo.com/wp-content/uploads/2012/11/E4191-378_010611.pdf

i need to check if i still have some LCD fluid and apolarizer. you can do neat things with that.
lcd fluid 'toggles' under temperature. so if you ahe something that heats up inside a chip you make a setup where you can get that spot to trigger without catastrophic failure. put a blob of lcd fluid on the naked silicon. then beam polarized light onto it. turn the polarizer until the image is dark. the heated spot will 'flash' as it heats up because the polarisation of the lcd material changes under heat.

i did lots of troubleshooting like that.
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Any comments, or points of view expressed, are my own and not endorsed , induced or compensated by my employer(s).
 

Offline Brumby

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #23 on: May 09, 2017, 02:26:43 pm »
i need to check if i still have some LCD fluid and apolarizer. you can do neat things with that.
lcd fluid 'toggles' under temperature. so if you ahe something that heats up inside a chip you make a setup where you can get that spot to trigger without catastrophic failure. put a blob of lcd fluid on the naked silicon. then beam polarized light onto it. turn the polarizer until the image is dark. the heated spot will 'flash' as it heats up because the polarisation of the lcd material changes under heat.

i did lots of troubleshooting like that.

That sounds like fun!
 

Offline PartialDischarge

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Re: EEVblog #992 - Olympus BHM Wafer Inspection Microscope
« Reply #24 on: May 09, 2017, 06:10:20 pm »
Nice microscope, I have the Olympus model before camera add-ons were available and the optics are very clear
« Last Edit: May 09, 2017, 06:13:46 pm by MasterTech »
 


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