Hi everyone,
i'm building a low current measurement setup which can use voltages up to 2500 V.
So I have a high voltage precision lab supply, and an electrometer like a Keithley 617 or some other pA capable SMU (see attachment). Now I need to protect the Electrometer from the high voltage if the device under test breaks down. The Keithley for example allows a max input voltages of 250V.
At first I was thinking about Zener diodes or TVS, but they have all way to high leakage and because they are parallel to the electrometer they should be extremely low leakage.
There is a device from Tektronix, especially made for this purpose:
https://de.tek.com/datasheet/model-2290-pm-200-protection-module-users-guidewith the promising spec: Leakage: < 10 pA at 200 V typical
but it costs around 1300 USD. And I wonder what they are using to achieve this value. The schematic on the case looks like it only uses a TVS diode.
Does anyone have an idea of a protection device for Vbd~200-250 V with such low leakage current? I think a gas discharge tube should work too, but datasheets usually only say insulation resistance > 10GOhm. How good are they really?
Thanks