Author Topic: HEMT Wafer Probe Card Layout  (Read 1958 times)

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Offline tec5cTopic starter

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HEMT Wafer Probe Card Layout
« on: August 27, 2016, 05:10:15 am »
I have some spare panel room on a design I'm getting fabricated and I want to utilise this space. I would like to create a test jig for the HEMT I am using which I can measure its parameters using wafer probes at my University.

Things I know:
3 probe setup - G S G
Dimensions of probes for probe pads; width, spacing etc
RF measuring layout pattern; given in datasheet.

What I am unsure of is how to combine the dimensions into a layout.

I found this in a Cascade Microtech app. note, I believe this is what I need to do?



This is my attempt, as you can see it didn't work out.



The probe pads (G S G) are 100 micron squares, with a spacing of of 200 microns from edge to edge. The HEMT device has pin sizes of ~740 microns wide, which I why the tapered lines were included. However, the wafer probe pads are spaced at 200 microns (edge to edge) apart. This results in the tapered line from Gate/Drain pins overlapping with the ground strips for the two Source pins. (my apologies for the crude drawing)

Any advice on where I am going wrong?  :)

EDIT: I just noticed that the dimensions for the spacing between the Drain and Gate probe pads is incorrectly labelled in my diagram (I said it was crude!  :P ). It should be 2.06mm/2060 microns
« Last Edit: August 27, 2016, 05:14:24 am by tec5c »
 


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