MEMs and Smart Devices Design Documentation

[jafacakes]

Hi all, I'm a long-time viewer of the show but first time Forum-user.
I am doing my 4th year of an EE MEng here in the UK and one of my modules is asking me to design (and simulate) a MEMs or Smart Device.
I would like to ask if anyone knows of a good source of information (e-book if possible) where I can actually see how things like Accelerometers, Pressure Sensors, Gyros etc. are laid out on silicon and the reasons behind one design over another.

It is my understanding that this sort of information is critical IP to the companies that design them, which I why I am having such difficulty in finding specific design information (e.g. diagrams of the silicon layout, equations for the changes in silicon properties with physical deformation etc.).
Can anyone help me?

(n.b. i'm not looking for answers here, just for where to find more information)

[KedasProbe]

Maybe you can get some info from the examples in the simulation software
http://www.comsol.com/showroom/product/mems/
If you make an account you can download PDF documentation of the examples.