Yup, that.
So, a few things remaining --
1. Capacitance. At your bandwidths, this doesn't matter; it does however relate to die size, and overall cost... to the extent that those are related. An SMAJ part might be more expensive than a little TVS array. Or maybe not, you can find some pretty boutique parts that are way more expensive than their capability would seem to suggest! Anyway, to whatever extent you're motivated by cost -- shop around, of course. No need to lock yourself into something special, unless it offers characteristics that you absolutely need. You may find something with much lower capacitance -- or much higher for that matter -- that turns out to be economical.
Which...
2. Peak voltage. Yeah, it's tested at high current -- ESD delivers a peak current over 10A, for just some nanoseconds. It's very destructive, for very small (semiconductor) structures that are vulnerable to those currents and energies. Particularly important is the transient or incremental resistance (approximately Vpk / Ipk; technically, dV/dI is the exact meaning), and the series inductance
which includes trace and via length -- your layout is as important as the choice of device!
Now, because the clamping voltage is still relatively high (10s of V), and the incremental resistance is so low (ohms, or fractional ohms even) -- consider the TVS, while clamping, as a Thevenin equivalent source of that voltage and resistance. Clearly, if you were to wire it directly to your MCU or GPIO or whatever -- it's not going to be happy, all that available current will just plow through whatever measly diodes and internal resistance those pin structures have.
So, limit the current, by simply placing a series resistor between TVS and logic pin. The goal is not to completely prevent ESD current into the device -- that's simply not necessary; the goal is to reduce current to safe levels, so the device can recover without damage (class C test criteria), or without power cycling (class B), or without any upset at all (class A).
What current levels are safe, isn't always so easy to find; most logic is good for 10 to 100mA. You'll find 74HC family logic rated for around 100mA (above which, CMOS latchup occurs -- effectively the power supply gets shorted out, the affected chip gets very hot (maybe to destruction), and at least a power cycle is required for recovery). Most MCUs are somewhere around 0mA (crap ones(!?), ADC inputs) or +/- 5 to 10mA (most GPIOs, e.g. STM32; may or may not include both directions on 5V-tolerant pins, RTFDS!
).
Note the series resistor introduces another lowpass filter, between the TVS (which as you note is already some capacitance) and the digital pin. So this again limits bandwidth, and obviously it directly limits current output from the pin, if using it to drive loads instead -- you may need to prefer smaller value resistances for such situations, which requires a tight compromise between ESD performance and output capacity.
Alternatively, add a buffer with better ratings (like a 74HC bus interface or something), which might even be socketed so it can be expendable while protecting the MCU behind it.
There are many strategies to brain-storm about, for these sorts of things of course; but until you need the bandwidth, yeah, nothing crazy here.
TVSs -- there are two types at low voltages. Well, kinda three.
1. Clamp diodes -- not a TVS at all, or at least not purely. When the pulse is brief (like ESD or EFT, but not like lightning-induced surge), use the power supply to your advantage -- the amount of charge delivered is small relative to the total filtering on a typical supply, so diverting the pulse into it, can deal with it just fine. Typically, you want at least 1uF total, with a modest fraction of it near the clamp diode itself. BAT54S and BAV99 are typical choices, as well as clamp diode arrays (2 and 4 port), which often have a VCC-clamping TVS in them as well (so they can be used alone, unpowered, in many cases, or double as VCC clamping too!).
2. TVS diodes. Some exist for 3.3V, but they suck. The problem is, low voltage zeners are true zener diodes. (And a generic TVS is just a beefy, well made zener diode.) Zener breakdown has a slow knee, below which leakage current is rather high, and above which, incremental resistance isn't very low. So, under pulse conditions, a "3.3V" zener or TVS, might still clamp at the same 8 or 10V that a "5V" part does.
So, you mostly see TVSs down to 5V, where they are quite reasonable.
The sweet spot between zener and avalanche breakdown, is around 6V. The knee is sharpest there. So, parts with nominal ratings from say 5 to 9V are pretty good, having fairly low leakage combined with sharp clamping. In higher ratings, the exponential response of avalanche takes over; it's still pretty sharp, giving a peak clamping voltage of say 30% above nominal rated voltage.
3. Snapback diodes. These are a special multilayer device, sort of a hybrid between TVS diodes and BJTs or SCRs. There's some semiconductor magic involved in their construction, but the result is a characteristic that can be very sharp -- indeed, the effect by itself has dominant
negative resistance -- even up to very high currents. By balancing that characteristic with internal device resistance, they can make a very
stiff (low dynamic resistance) device, while still getting low leakage, and low nominal voltage ratings. Example:
https://semtech.my.salesforce.com/sfc/p/#E0000000JelG/a/44000000MCod/Fs.eSBQs1U.304Nkc5rxRZ3Lk6_1A4.ZX_npjU1R.C8Without a whole lot of reason to pick otherwise, I would guess the clamp diodes will be adequate for your purpose -- but there are other options available.
Tim