ENI MKS DCG-100 RPDG-100A 10kW 1kV DC power supply for plasma deposition.
LeafletThe ENI and MKS units are roughly the same. Some conenctor changes, but AFAIK functionaly equivalent.
Uhm, what? Lol. Nobody here will be doing any kind of plasma deposition. Stupid Ice-Tea!
Yes, well, maybe. But aside from some funky features (arc detection, duty cycle stuff, bipolar functionality,...) it's still a very competent (not to mention high power) regular power supply. If I can get it to operate as such..I actually got the manual (kinda) so that helps..
Manual.pdfIt's not 100% correct, output connectors per example are not the same.
Note I've been playing around with two units that I'm using for testing as they both have some damage (front grill, or in this case a broken rotary). If anyone is interested, I have undamaged units as well. Anyways... My first problem was that these units need a 3-phase 200/208V L-L supply. Which is readily available in the US, but not so much around here.. So, I was first looking around for a trafo setup untill I realized I have access to a lab that (still) has a 3-phase 220V L-L connection available. Close enough. So, moving on.
It boots! But...
The "interlock" is a feature that disables the unit and/or outputs if the cover isn't closed, if there is no output connector connector, if a doorswitch is not closed etc.. Not that crazy for a 1kV+ (still need to check the max...). I figured out the orange connector at the back rather quickly, but unfortunately, due to some differences between the MKS manual and my units
I was stuck after that. So, popping the hood!
Note how clean they are inside. They've spend their lives in a cleanroom, and it shows. Or doesn't. You know..
Some reverse engineering tought me that two pins on the output connector need to be shorted to defeat the interlock:
So, done yet? Eh, no. Still in Interlock protection. One of the connectors at the back, for remote operation, also has an interlock. Unfortunately, the manual has no pinning for these connectors just a "yeah, we're not gonna bother, it's the same as another series". Kinda sucks if the manual for the other series is not available. Anyways, took me some tracing over several boards but in the end I figured it out:
Now it works! As I didn't want to operate a device at several 100 V's with just a piece of wire jammed in the output connector, I attached to the internal connection:
Huzzaaah! I actually ran it up to 4kW, attached to a lightbulb load in the back.
Some notes: this thing is *loud*. Two 15W German built fans will do that. I actually had a bunch of screws behind the unit at first launch and they were pretty much scattered across the lab after that.
I can't get it to operate below 100V atm, pressumably because the arc protection is still on. Doesn't look like I can defeat that through the frontpanel, probably need to do some serial commands for that. Work for another day.
Also work for another day: as far as I can see, this is a fairly straight forward 3-phase rectifier connection. I'm farily confident that it will run of a single phase 230V connection. The nominal 230V is roughly in range of the 208V +10% requirement (even though well outside of it once taking the 230V +x% into account). So, with the same currents running, it should work nicely up to 5kW or so. So I plan to run it off a trafo, see if and at what voltage I start to draw more current to see if it would hold up at, say, 240V or so.
For sale?
Yeah. But there are a few caveats.
- This is HV supply with some quirks. If you're not at ease with HW power electronics: don't buy it.
- You'll need a 3-phase 200/208V L-L power grid
Other than that: if you need some serious voltage and power, this might be interesting for you...
EDIT: Runs fine of a single phase 230V connection (measured at 238V, feeding 4kW bulb bank).