Intel and IBM were the silicon semiconductor technology leaders a decade and half ago. Poor management and lack of significant government supplements without "strings" allowed others to take the lead. TSMC has done superb job of pushing the technology cart, taking over from IBM and Intel, so hat's off to them

The wavelength of green light is ~550 nanometers, so at 5 nanometer feature size this is 110 times smaller than the wavelength of green light

The technology behind the ability to do photolithography at this feature size is amazing, massively defying conventional optical physics (diffraction limited). Other areas are also looking into "defying physics" (not as much as with photolithography tho), research into things like breaking the Nyquist limit with faster than Nyquist communications for example.
Before I retired a few years ago TSMC had a university program where qualified universities got access to a simple 65nm CMOS process. USC and Cornell made good use of this producing the "Physics Defying" Non-Uniform Sampling ADC (NUS ADC) and PolyPhase Mixer (also called N-Path or Mixer First) respectively. The NUS ADC sort of defeats Nyquist limits by allowing the input waveform to define Nyquist rather than the ADC clock rate, no Pre Filter is involved but a Post ADC filter is employed. The PolyPhase Mixer defies conventional Mixer Physics by posting Noise Figures (<2dB) below the theoretical conventional mixer limit of 3.92dB without a preamp. See chip images below in TSMC 65nm CMOS Technology (NUS ADC, PolyPhase Mixer) from nearly a decade ago.
Anyway, having the later part of my career directly working with these advanced SOTA semiconductor technologies has given a different perspective on what we were all taught in grad school as "physics limits & barriers"

Best,