General > General Technical Chat
EUV light source - didn't know that :)
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Berni:

--- Quote from: NiHaoMike on November 10, 2020, 12:43:33 pm ---What's stopping them going to Xrays which are even shorter wavelength but relatively easy to generate?

--- End quote ---

I think the problem with those is that they start ignoring the reflective optics and going straight trough it, even if you can get them focused down into a mask then they might go trough the mask itself. Those Xrays are notorisuly hard to wrangle.

And yes also possible that large quantieis of Xrays might mess up the silicon chip that is being manufactured, not sure how much energy is needed for that. Maybe they instead move towards shooting electrons at it with an electron gun, tho those can also get destructive once you give them enugh energy.
David Hess:
I wonder why they could not use a synchrotron source.  Are they too large to be economical?
Marco:
Apparently TSMC is the only company which can make it work with decent yields.

The debris from the tin ball screws everything up, I wonder how they fix it ... electrostatic filter perhaps?
Marco:

--- Quote from: David Hess on November 10, 2020, 04:09:31 pm ---I wonder why they could not use a synchrotron source.  Are they too large to be economical?

--- End quote ---

AFAIK the industry refused to invest significantly invest in researching Free Electron Lasers mainly because of space requirements. Of course given the delays and yield effects from the tin light sources it might not have been the smartest decision in retrospect.
Twoflower:
This is provides a bit more information about the EUV process:
https://www.youtube-nocookie.com/embed/f0gMdGrVteI?rel=0

About the EUV source: At about 6:00 there is some more information. They actually hit the tin droplet twice. Even is a bit marketing-ish with photoshop-fail like video sequences it still contain some impressive information.
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