General > General Technical Chat
EUV light source - didn't know that :)
daqq:
So, apparently a normal light bulb ain't gonna cut it, so to get the silly wavelengths required for today's EUV processes ( ~13.5 nm ) you need something special.
What they do is:
Shoot a microscopic droplet of tin (~30 um) into a vacuum chamber.
Hit the droplet at precisely the right time with a CO2 laser.
The droplet becomes crazy hot, forms a dense plasma.
Plasma blinks at the required wavelength.
Light is gathered by insanely polished special mirror.
Light travels through the rest of the machine.
Rinse and repeat thousands of times per second.
Just wanted to share, pretty interesting stuff :)
jogri:
I wouldn't want to be the guy responsible for maintaining this thing... A mirror that has to be polished enough to reflect 13 nm light inside what is basically a sputtering system sounds like a fun combo.
Cerebus:
--- Quote from: jogri on November 09, 2020, 10:02:36 pm ---I wouldn't want to be the guy responsible for maintaining this thing... A mirror that has to be polished enough to reflect 13 nm light inside what is basically a sputtering system sounds like a fun combo.
--- End quote ---
That was my immediate first thought: "Hold on, where does all that tin go? How do they keep it off the mirror?"
S. Petrukhin:
--- Quote from: Cerebus on November 09, 2020, 10:42:39 pm ---
--- Quote from: jogri on November 09, 2020, 10:02:36 pm ---I wouldn't want to be the guy responsible for maintaining this thing... A mirror that has to be polished enough to reflect 13 nm light inside what is basically a sputtering system sounds like a fun combo.
--- End quote ---
That was my immediate first thought: "Hold on, where does all that tin go? How do they keep it off the mirror?"
--- End quote ---
Maybe they blow it off with a smoke catcher? :)
daqq:
I'm pretty sure that the tin removal is one of those things that are the secret sauce of the manufacturer :) That said, if you shoot the tin droplet from behind, won't it splatter in the forward direction?
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