I recall there's also a way to coat using mixed chlorides, which probably leaves a lot of chloride impurity (doping?) in the deposit too. Whether that's of commercial interest, dunno...
And yeah, indeed films can have different behaviors from bulk materials; I don't know if this is true of ITO, or most amorphous or poly materials you'd deposit on glass, but something to think about in any case.
Why the curiosity, are you updating these data or something? Haven't found anything in literature sources? Or, looking for something more primary (direct experimental)? Or just not sure about the veracity of the given numbers?
Tim