Update a year later (in case anyone cares): Digikey now actually stocks three values of the Yageo RC0075xS series. Avnet shows available to order.
KOA Speer sampled me 1,000 pcs of their RK73B1DTTX101J (100 ohm, 5%) 10 months ago so it is a real part, but they are very slow to respond to inquiries.
ROHM has these smaller sizes supposedly available to order but they are all on allocation and not with distributors.
Other manufacturers with at least data sheets are Cyntec and Topline.
Please make inquiries so the manufacturers can see some interest.