Welcome to the forum nano_user,
I'm not sure how much it helps, but here's a writeup of an attenuator I built recently for 10kV
peak with AC compensation...
https://www.eevblog.com/forum/testgear/high-voltage-x10-attenuator-for-my-gay-mta-memory-voltmeter/msg1723094/#msg1723094Building one for 1kV should be at least 10 times easier, although you still need to be very careful of insulation and overload tolerance.
Things that I learned:
- Voltage coefficient of resistors is at least as important as capacitor TC. You need to go for higher voltage parts than you think you need, and pick low voltage coefficient specified ones.
- When capacitance trimming, beware of the voltage rating of trimmer caps. I used trimmed cable length to adjust compensation.
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Safe air-wiring avoids PCB leakages and parasitics.
- You need an accurate way of measuring the capacitance of assembled RC assemblies.
- If you can avoid screening then you can avoid more parasitics, not sure how practical in your case.
- NPO or C0G capacitors should be more available for 1kV use, series connection could help with voltage rating.
Work out how you are going to achieve consistent capacitance connection to your DMM (banana plugs and leads won't be sufficient) and check how consistent the DMM's input capacitance is across different voltage ranges.