Retest with 11KOhm BMF resistor in series with DUT.
1st test was for noise floor for 41421B SMU (cap not connected, resistor just hanging in the air in DUT box).
Source 10V, measure current.
It happen to be ~160 fA (femtoamps) average, with noise ~400 fApk-pk.
There are no Teflon plates or insulators in the DUT box, and also GNDU return for ground is routed using 1m long twinax cable, not a low-leakage triax. Don't have extra triax cable with two TRX ends
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Now connect 1300uF 30V wet tantalum XTV cap #1 (same one measured by K2400 at ~3.2nA Ileak before) as DUT and test again.
Leakage around 1.21 nA +/-0.3nA at 10.00VDC sourced, over >6 hours, even with 3C ambient temp change. Cap had to soak at 10V for ~20hours to stabilize at this level, just like Jim Williams observed and hinted in Linear AN124.
Next test - cap #2, same conditions, starts today