Meanwhile i looked into two possible sources of systematic errors.
First the SMD adapter i am using for the arrays has copper traces of different length. The traces of the outer resistors R1 and R8 are longer than the others and copper contributes with a strong positive TC of 3930 ppm/K. The trace resistance was determined to be about 25 mOhm, so the variation due to different trace lengths may be half of that. Each resistor has this twice (on each of two terminals). So i am getting
25 mOhm / 5000 Ohm * 3930 ppm/K = 0,02 ppm, much smaller than the observed effect.
A similar calculation applies to bonding and frame inside the array, so this may be part of the observed pattern. And then it isn't a systematic error of the measurement, but an explanation why the parts show that pattern.
Second i changed the scanner process to take two measurements for each channel. The standard deviation between the two measurements is about 1.5 ppm, with no systematic difference, except for the PT1000 sensor that shows a shift of +22 ppm due to self heating. This shift is equivalent to 5.6 mK.
Regards, Dieter