I just completed construction and initial testing of a prototype current to voltage converter. The first test results look good!
I decided to use an AD8067 after not being satisfied with the single polarity of a OPA380. I found that the first AD8067ARTZ which I used exceeded its specification sheet open loop gain figure by enough to permit the accurate use of a 10M ohm feedback resistor. That provided resolution of the readings down to 0.01 pA while using the AD8067 circuit feeding my 34401A meter. Admittedly the "meter zero" using the 10M resistor was 13.02 pA (8.61 pA when using a 1M feedback resistor). Correcting for this zero, the accuracy of the current readings using the AD8067 for readings down to 100 pA was under 1%.
It was tough for me to find an accurate current to use as a reference standard for these measurements. The 10 nA resolution on my 34401A obviously was inadequate. I didn't have a more appropriate meter available (that's the reason for this project). So my calibration was made using an accurately measured voltage (via the 34401A) and 300M, 1G, 5G and 10G ohm 1% resistors. I also have a 40G 5% resistor available. However, I didn't consider its accuracy as being adequate. So, 1% accuracy was the best accuracy which I could measure. Because of that, the actual accuracy of my AD8067 circuit is probably better than what I measured. For higher current levels I have a variety of 0.1, 0.01% and better resistors which were used.
I didn't try and measure the burden voltage or what should be called the burden resistance of my AD8067 circuit. It obviously wasn't significant at least compared to the limited accuracy of my reference current. Correcting for the meter zero was the only post reading change which was made. When that correction was not made, the converter had better than 1% accuracy for 900+ pA readings. I haven't decided if I am going to add a zeroing circuit to the converter or not. It is probably simpler to simply let the 34401A zero the reading when there isn't any current through the input of the converter.
I have selectable 10M, 1M, 100k, 10k and 1k ohm feedback resistors in my prototype circuit. That permits measurement of currents as low as those mentioned up to 10 mA. For the 1M (1 uA = 1 V output) and 1k (1 mA = 1 V output) I have precision calibration added. For example, I have a 976k resistor in series with a 50k trimmer instead of a 1M resistor. That permits precise calibration of that range. There's a similar combination in place of the 1k resistor. So, hopefully those two ranges are more accurate than with the 0.01% resistors used on the 10k and 100k ranges.