Recommendations for a SSR IC for high speed ATE switch matrix?

[MajorEE]

I am looking for a higher performance SSR IC to built a solid state switch matrix for an ATE.  Anyone have any recommendations on something more generally available?

I have been testing the VOR1121 SSR from Vishay but it has a lot of on capacitance ~40pF.

Attached is a paper discussing a Yokogawa part that had <5pF capacitance, and >200V rating.

I have been building switches using reed relays like a Cotos but I am looking to bring a solid state product out as well. Alternatively, I was thinking about using a photovoltaic coupler and some COTS FETs, too.

Thoughts or recommendations?

Thanks!