Probably the fastest today is upwards of 100GHz, build on monolithic InP substrate, CMOS, sub-micron feature size. Purposes range from electrooptical circuits to radio and line communication receiver blocks (injection locked clock dividers, ring oscillators, amplifiers, mixers..). At least, those are some of the articles I've read.
In the 70s, Tek also used tunnel diodes, which perform the given operation in, theoretically speaking, picoseconds -- it takes longer to transmit the signal along the component leads than to switch.
If you want to go out to Digikey and pick up some parts for testing, I'd recommend something like BFR92AW (~5GHz Si NPN) for general purpose fast-snot application. Fancier devices (PHEMPTs, MESFETs, HBTs) are available discrete with fT up to 60GHz or something like that; again, pretty much more bandwidth than you can shake a PCB at (use them carefully, they'll oscillate at frequencies you didn't know existed!

).
Tim