Electronics > Projects, Designs, and Technical Stuff

MEMS - nice die pictures

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iMo:
Any idea how the membrane and the hole have been manufactured?

Noopy:

--- Quote from: iMo on October 18, 2023, 06:44:07 am ---Any idea how the membrane and the hole have been manufactured?

--- End quote ---

They do some ething...  ;D

I don´t know the details but the whole MEMS world depends on ething the right materials at the right time in the right direction.
Here in my view it is easier because they do just "normal" etching into two parts and after that bond the two parts together. More complex and small structures need sacrificial layers and more selective etching in more challenging places.

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