Electronics > Projects, Designs, and Technical Stuff

MEMS - nice die pictures

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Noopy:
Hi all!

I have taken some pictures of a ADXL213 acceleration sensor.
A interesting / beautiful thing!  8)

See the full story here:

https://www.richis-lab.de/ADXL213.htm




Small thing…




Nice!  8)






Hello MEMS!

 :popcorn:


I hope it´s ok that I started a new Thread only for these pictures but at least they are looking quite good...  ;D

Noopy:

I have taken pictures of a new MEMS-device:

Hoiden KRM5603 microphone








Too much pictures.
If you are interested please visit my website:


https://richis-lab.de/MEMS_01.htm

Noopy:
One, two, three, today I have a 3-axis-acceleration sensor for you: AIS328DQ





Again a lot of pictures, so if you are interested please visit my website:

https://www.richis-lab.de/MEMS_02.htm

Of course we can discuss whatever you want here and in english.  :)

Have fun!

Prehistoricman:
What's the reason for the appearance of the left side of the AIS328DQ? Looks quite unfortunate haha

Noopy:

--- Quote from: Prehistoricman on March 22, 2020, 09:20:12 pm ---What's the reason for the appearance of the left side of the AIS328DQ? Looks quite unfortunate haha

--- End quote ---

Left side is the X-/Y-sensor.
The frame is flexible mounted with springs (the four long things in the frame) and moves with the acceleration.
Inside the frame there are four squares containing the "capacitor-electrode-grids".
You have to use four squares because the capacity of the Y-electrodes vary also with a change in X-direction because they travel out (or in) their initial state. A Y-square left and a Y-square right gives you a constant capacity whenever X changes.

... ... ...or do you see a special symbol there?  :palm: It comes from america netherlands!  ::)

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