
For the A109, part of the mask set has survived. Only the mask of the metal layer and the mask defining the contacts between the metal layer and the active areas are missing.

Without more detailed analysis, you can already see the markings that were used to align the masks. These are two points each on the left and right edge (green/yellow), which lie on top of each other when the masks are in place. The green marked points are still visible on the present die, the yellow marked points have been cut off.
The blue marked structure allows to check the alignment of the masks against each other. These are four squares arranged within a larger square. As will be shown, for the masks that introduce an n-doping, the squares are set at the top left and bottom right, while for the p-doping, the squares are open at the bottom left and top right.
In the lower area, another auxiliary structure is shown (cyan). However, only two masks contribute to this structure.

The masks make it easier to analyze the structure of the integrated circuit. The starting material is a p-doped substrate. It is protected by a silicon oxide layer. For the sake of clarity, silicon oxide layers are not shown.

In a first process step a strong n-doping is introduced into the p-doped substrate. The n-doping later serves as a low-resistance collector feed line under the collector ("buried collector".

The mask for the buried collector matches the structures on the present A109. It can be recognized by the optically strongly protruding edges.
The high n-doping is located under each active structure except the PNP transistor T13 at the right edge. This transistor is a substrate transistor, a vertical transistor that uses the p-doped substrate as a collector. Vertical PNP transistors have better characteristics than lateral PNP transistors. But you can use them only if the collector should be connected to the negative supply potential.

After inserting the buried collector, a n-doped layer is applied using epitaxy. This layer covers the entire surface of the wafer.

At the points where isolated areas are required, p-doping is introduced into the epi-layer. The p-doping extends to the substrate and forms a well that isolates the active regions as long as the substrate has the lowest potential of the circuit.

Looking at the mask of the p-doping just described, we see that this not only creates isolated areas for the active elements. The areas under the bondpads are also isolated from the rest of the circuit. Only the bondpad in the lower right corner is an exception. The negative supply potential is transmitted via this bondpad, which is connected to the substrate.
In the active structures, the n-doping of the wells hardly stands out optically. It can be confined via the surrounding structures. In the next step, the isolation frames are widened. This means that the surroundings of the narrow isolation frames do not yet contain the n-doping. The boundary of the n-doping is the edge surrounding the buried collector. Above the buried collector, of course, there is this n-doping too.

In the next step, the p-doping is introduced, which, among other things, represents the base layer of the NPN transistors. At the same time, resistors can be represented with the base doping. As will be shown in a moment, this process step also strengthens the lateral isolation of the active areas.

The mask of the p-doping forms the base areas of the NPN transistors, collector and emitter areas of the PNP transistors and the resistors. In the NPN transistors, the base areas can be seen relatively well, since they are only overlaid by the smaller emitter area.
The mask pattern shows that the p-doping also reinforces the isolation around the active areas. This means that not only the narrow frame structures are p-doped, but also the immediate surroundings.
In the lower right corner of the die, one can see that the negative supply is connected to the isolation frame and thus to the substrate too.

Finally, a strong n-doping is introduced, which represents the emitter areas. It also forms the contact areas to the collector. A direct contact of the metal layer with the weak n-doping would form a Schottky contact, a diode. In addition, the strong n-doping in the contact area provides lower resistances in the path to the collector.

The mask of the strong n-doping has corresponding cutouts where the emitters are located and where collector areas are contacted. On the die, the collector contacts are usually hidden under the metal layer. The emitter areas are deposited by their edges in the innermost part of the transistor structures.
The NPN transistor T10 has a special shape. Together with the transistor T11 T10 serves as a current source for the differential amplifier at the input. Why this shape was advantageous remains unclear. The two transistors must have different base-emitter voltages. Probably this is the reason for the special construction.
Also noticeable are the two PNP transistors T9 and T13. Here the strong n-doping acts as a low impedance base contact. At T13, the vertical PNP transistor, the highly doped area circles around the entire active area to get a very low base impedance.
The large n+ area in the upper right area is a low impedance connection of the well to the positive supply. This is necessary because the highside transistor of the output stage is located in this well. With high currents through this transistor there is the possibility that the potential of the well shifts and the resistors integrated in the same well are influenced.

After completion of the active structures, an insulating silicon oxide layer is applied to the entire surface of the wafer. After that contacts to the active area are etched. The mask for this process are missing.

A metal layer is then applied over the entire surface of the silicon oxide layer and structured with another mask, which is missing too.
Finally, the entire wafer is covered with a passivation layer that protects the active elements from environmental influences (not shown here). This is probably silicon oxide. On more modern circuits silicon nitride is usually used. Where the bondwires are to contact the metal layer, openings must be etched into the passivation layer. This requires another mask, which is missing too.

Instead of the mask for the metal layer, the A109 document contains a kind of a wiring diagram, which shows where the individual elements are located.
Next to the resistor R11 there is a slightly shorter, unused resistor (yellow). By varying the metal position you can use this resistor as R11 or even connect both resistors in parallel. Thus it is possible to adjust the bias of the differential amplifier at the input.


With the above conclusions, one can assign all structures on the die to their functions.
https://www.richis-lab.de/Opamp72.htm 