Hello, I am having a similar problem. In my case I have to perform leakage measurement tests of semiconductors up to 1000V down to 1nA. I have a setup with a logarithmic amplifier but I need to protect its input, which is at stable 0.5V. I have tried putting an InterFET SMPPAD1 Diode between the input and ground in forward direction. The issue is that it seems that at 0.5V I have a leakage of around 8nA (very different as the stated 1pA in reverse). I have tried as well to put 2 Diodes, one from the input to the guard, which has the same voltage as the input (+/-20mV) and the guard to ground, it improves but I still have 6nA leakage.
Is there any better suggestion to protect my input (while keeping the 0.5V constraint) and still being able to measure 1nA?
Thanks