There's definitely a defect in the 0.5µA current source circuit, see table.
I also measured on my 3458A that the nominal currents should be quite precise, to about 0.5%.
I used a 34465A.
10M, 100M, 1G : 498nA
1M: 4.98µA
199k: 49.8µA
10k: 99.6µA
1k, 100: 994µA
10: 9.94µA
What makes me wonder, why this too high 500nA current in the end affects the ACAL process.
This current is measured by the DCI circuit, and any deviation (in the 6M resistor, or in the 3V reference voltage) would normally be calibrated into the Ohm range gain.
Therefore there is a difference between the ACAL mode and the measurement Ohm mode, in first case measuring a lower (correct ?) current, in the latter case too high a current.
Anyhow, in a first attempt, the 500nA source has to be investigated.
I also stumbled a bit about the other ranges, don't know if it's of relevance. I can't judge, how precisely you measured the other ranges, as their currents seems to be too unprecise, too: 3% vs. 0.5%.
But if you find similar values on your other, known-good 3458A, then it's only your test setup.
So let me think again, what's going on.
Frank
I suspect now U300, which should be a low bias type. If this OpAmp drains 100nA into the node, that would make a 20% effect in the 10M .. 1G ranges, but only a 2% effect in the 1M range.
In the 34401A, this similar OpAmp type (AD706) very often fails after years, with excessive bias currents.
The 34401A has many similarities with the 3458A, as it's derived from its design.
Therefore it would be interesting to measure the low currents more precisely, by means of your 2nd 3458A (lucky guy).
This topology of the current source was already designed for the hp3468A, hp3478A by a former hp engineer by the name of George Hnatiuk.
In the 3478A, an LM208 was used at this place of U300, which has typically 800pA bias @ 25°C.
That's a bit high, and I do not know, which type this U300 might be, otherwise.