Trying to fix a Metcal MX500. Q4 dies as soon as the unit is switched on, with all three terminals shorting to each other (2-6 ohm resistance). I've double checked all capacitors, transistors, diodes, and now inductors on the board, and everything looks ok. All capacitors that could have any effect on Q4 have been checked out of circuit. With Q4 removed from the board, the voltages on Q4's gate and drain look ok (checked with an oscilloscope), nothing that would exceed the +/-20V gate/source and 200V drain/source ratings of IRF640N. Some questions:
1) In what scenario would an N-channel MOSFET fail in such a way that all terminals are shorted to each other? Overvoltage on the gate?
2) Is it common for capacitors to test ok at lower voltages (as tested with a multimeter), but fail at higher voltages? What would be a good way to test capacitors that normally operate at ~50V and 13.56Mhz?
3) What other components typically fail when Q4 dies?
4) Any other tips on how I should proceed?
Many thanks!