Any decent benchDVM/DMM can measure currents in the 100nA range, even something old like HP 3455A/3456A without current measurement can do it. Just clamp something like a simple 10M resistor between the terminals and you get 10mV/nA. 3456A has fancy math functions, so you get the reading directly and don't have to do the math yourself.
Keithley stuff is usually much better than that, usually goes down into the pA and fA ranges. They also use other/better principle (balanced opamp) for measuring low currents (no more shunts, no more voltage drop over shunt). Basically the instrument acts as a current sink and uses an opamp with an feedback resistor to keep the input at 0V. More current into the instrument, opamp applies more (negative) voltage to feedback resistor to keep the input at 0V. Want a lower range, simply use a larger feedback resistor, the input resistance of the opamp is more or less the only limit. (read an old Keithley manual, if interested in this measuring principle)
Oldish Keithley 602/610C are sometimes quite affordable (but only has analog display with something like 1% accuracy). Keithley 616/617/619 usually cost more, 6517 is even more expensive.