I just got my DE-5000 and have been measuring some SMD capacitors I had lying around with the tweezers. It works fine for capacitors above ~15pF, however, below that the values are quite a bit off. Here are some measurement results at 100kHz:
Specified: 1.0pF +/- 0.25pF, Read: 1.95pF
Specified: 1.5pF +/- 0.25pF, Read: 2.41pF
Specified: 6.8pF +/- 0.25pF, Read: 7.84pF
Specified: 12pF +/- 5%, Read: 13.01pF
The claimed accuracy of the meter is 2.0%+5 in the 200pF range using a 100kHz test signal. Tweezers were calibrated, all of these capacitors were fresh from Digi-Key and none of the measurements are within spec. I realize that measuring such small capacitance values can be tricky, but I was expecting better than a 50%+ error in the 1-2pF range. Can anyone verify these deficiencies in accuracy? Is a meter like the BK Precision BK880 better suited for such measurements since it has a 4pF range (albeit with no accuracy specification for it)?