Maybe the Keithley 2300 series can do that, it's main purpose is to simulate batteries. See below the specs of the 2304A model:
TRANSIENT RESPONSE TO 1000% LOAD CHANGE:
NORMAL MODE:
Transient Recovery Time:
<50µs to within 100mV of previous level.
<100µs to within 20mV of previous level.
ENHANCED MODE:
Transient Recovery Time:
<40µs to within 100mV of previous level.
<80µs to within 20mV of previous level.
Transient Voltage Drop:
<100mV, typical.
<200mV, typical.
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