Plasma treatments work fine at low pressure!
From spectroscopy in air, in an argon seeded Cold Plasma near STP, we found:
Some N2+, O2+, O3, O-, OH-, N-, NO2 and NO3, H2O3+, OH, etc...
Yes, the electrons have a longer free path, forgive me if I mis-spoke, that was 15 years ago.
If water, Co, Co2 or hydrocarbons are present, it gets complex fast.
There are other effects as well, the discharge is rich in far IR, Mid IR, and a 750-950 nm band. some 350-420 nm UV, and the 600 nm nitrogen orange band. Very little visible light compared to the IR and UV.
Steve