The reason why confirmed that AT89S52 has a malfunction is because I obtained a very old EE87C521 chip, which should be from HP 34970A. After installing it, the instrument no longer prompts ERR: 625, but there are other issues with the instrument and I am unable to read the data on 87C521. So I can only search for the data of AT89S52, I have all the conditions to read and write it.