how to create a large number of seperate HV amplifiers & DACs in a small space eventually leading to a custom chip
How fast should be those DACs? If not very fast, my first go to thought for how to get many DACs on a chip would be to use a 1 bit PDM (Pulse Density Modulation) followed by an analog integrator for each DAC.
The algorithm to get PDM is very simple, a digital adder, an accumulator and a register that stores the digital input to be converted into 1 bit pulses. At each step the register is added to the accumulator. The overflow bit from the adder is the PDM output to be integrated later by an RC low pass or similar.
This is a small project I did once, that gives to each pin of a microcontroller a better LED dimming than a PWM could do. If instead of LEDs we put an RC integrator, then we can get independent ADCs.
https://hackaday.io/project/6356-delta-sigma-versus-pwm 
At each step, add the requested duty cycle to an accumulator. When the accumulator overflows, we set the output to high. If it doesn't overflow, we reset the output to low. Then, in the next step, continue adding from where we were left.
The initial test device will have at least 64 channels, likely 80, and each channel must be fully independent controlled in absolute amplitude and waveform with 14~16 bits. This is like a 64/80 channel AWG with output range of +-75V, was +-150V. Each channel must be toggled very precisely between + and - so the average DC offset is zero within a few mv at rates up to 10KHz. When the chip is developed the BGA package will limit the number of outputs which hasn't been established.
Thanks, yes a PDM DAC could work, but the required integrator would be limiting when the chip is developed, which is the end goal. Although we are looking into AC coupling to allow a unipolar waveform creation and solves the DC offset assuming capacitor leakage can be managed. The caps are the limiting factor because of leakage and waveform distortion, tend to be physically large, must withstand a high voltage, and required for each channel. We came up with an interesting method to compensate for the AC coupling waveform distortion which compensates all the channels from a single compensation source which would allow a smaller cap for a given level of waveform distortion. The concept involves predistortion of the DAC waveform by means of manipulating the reference voltage. Since these DACs are multiplying types the reference is multiplied by the DAC to render the output, thus all DACs that use the reference can be predistorted regardless of output waveform level assuming a linear system. This predistortion is valid for a given waveform type, but all channels will utilize the same waveform type. The main DAC reference requires a predistortion compensating waveform riding on top of the reference DC level, which can be implement with another DAC or other "analogish" means. Of course you could just implement the predistortion characteristics with each DAC waveform, but this may drive the DAC resolution to higher levels, and each DAC is required to be capable of this added resolution.
One might think that just preceding the AC coupling which is a 1st order high pass function, with a low pass function would cancel and the distortion result would be eliminated. However, this is not the case as a little analysis shows the HP as S/(S+A) and the LP as 1/(S+B), so the LP*HP = S/(S*S + S(A+B) +A*B) which clearly is not unity!!
The solution involves fitting the above mentioned transfer function which is zero at S=0 and zero at S=infinity, to the desired waveform and frequency range to yield a result that approximates a constant over that range. Another way of thinking about this is the AC Coupling HP approaches infinite attenuation as you approach zero (DC) frequency, and the LP approaches infinite attenuation as you approach infinite frequency, so they obviously can't compensate for each other over the entire frequency span!! Haven't seen this done before regarding the DAC reference hosting the correction waveform for passive component compensation, although haven't seriously looked, and we haven't decided yet to file disclosures being too busy with other things at the moment.
Created a simple evaluation test to show the effects of this technique using the AWG (SDG2042X) two channels, one channel had the desired waveform and the other channel had the compensating waveform tailored for the AC coupling characteristics. Passed thru the AC coupling network and the result works very well indeed

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