In the classical sense, "low distortion" and "square wave" do not belong in the same sentence! A square wave has lots of harmonics (infinite in the purely theoretical sense) and by definition has high distortion (approaching 50%). If you mean by "low distortion," namely what "looks good on a scope," then, as the previous post says, it is limited by the 20 ns rise and fall times which will turn a high frequency square wave into a trapezoidal waveform.