Perhaps one step back first. My aim is a diy measurement, with an aspirational accuracy approaching 0.1% tolerance (ie. 1000ppm, not circa 10ppm). My target parts are all vintage polystyrene, with a likely significantly large tempco in the range of circa 100-160ppm/degC, so I have to be mindful of ambient temp getting outside of my typical 20-25degC span. And I only have three measurement techniques to call upon: an Aneng 8009 handheld; a soundcard and software with calibration to a 0.05% resistor; and Mariscotti's technique with some 0.1% tolerance bridge arm resistors (I only have a small number of ad hoc values to hand of Welwyn RC55's that are used and may be subject to abuse). So I need to be aware that I can't shoot for the stars wrt absolute accuracy and tolerances.
I have just undertaken a sweep of measurements using those three measurement techniques, and they all certainly correlate to each other. The soundcard/software and Mariscotti techniques align to about a consistent 0.5% difference (1-9nF and 10-90nF decades so far), whilst the Aneng meter is consistent within a range and about +2%, +0.9% and +0.4% for three increasing decade ranges.
My initial view is that the soundcard/software provides the highest confidence, as soundcard sample rate frequency is 0.0011% low (compared to <1ppb GPSDO synthesised frequency), and calibration is to a 0.05% resistor, and measurement value can be aligned to a frequency where phase shift is 90deg.
Apart from the techniques, I also aim to characterise the 4-decade capacitor box, which has a circa 65pF intrinsic stray capacitance which is likely due to the 4 switch mechanisms (each switch mechanism uses multiple contacts and associated wiring as each decade only uses 4 capacitor parts), and where the stray level appears to change with switch setting by up to about 20pF (ie. certainly noticeable on the 100p-1000p decade), so I will likely need to make a lookup table.
The Mariscotti technique provides about 0.02% tolerance in frequency, mainly due to the toggling and frequency step size available to get equal voltage readings on my 6.5 digit picotest. However so far I have used a 10k 0.1% bridge resistor which I haven't attempted to cross-check with the other 0.1% parts I have to provide some confidence it is still ok. I also have some doubt about making measurements that are not in a frequency range where phase is known to be 90deg.
I do have the ability to suppress stray capacitance to ground on the meter side (by using a 4 digit handheld meter), and on the excitation side (by using a laptop and battery powered soundcard), so will try those next when I do a measurement sweep of the 100p-1000p decade.