In fact, the parasitic capacities are way more complex than shown in the image above. For instance, there are some additional capacities at the analog switch. Hard to simulate. However, I have determained some phase correction values by measuring the phase of resistors (where I assumed no reactance). I use this values to compensate the phase deviation over frequency and gain setting. The overall phase error is not perfect but good enough to make some considerations about accuracy. I have created an accuracy chart which shows the impedance accuracy over frequency. This is based on resistor measurements only, but I assume that capacity and inductance results ar not far from that. Furthermore, I decided to specify only up to 80 kHz. 90 kHz is possible but, well, not very precice.